3M氟化液FC-3283是無色透明全氟化學(xué)品，具有良好的化學(xué)惰性、電氣絕緣性能、熱傳導(dǎo)性和獨(dú)特的第表面張力廣泛應(yīng)用于半導(dǎo)體制造廠作為熱傳導(dǎo)介質(zhì)。其液體溫度范圍為-50°C 至128°C，主要應(yīng)用于蝕刻設(shè)備、離子注入設(shè)備、測試設(shè)備及其他設(shè)備。因?yàn)?a class="text0001">FC-3283是單一組分，所以其成分不好出現(xiàn)降解或者過期。FC-3283沸點(diǎn)高，其隨時(shí)間的揮發(fā)也比較少。
3M Fluorinert Electronic Liquid FC-3283 is a clear, colorless, thermally stable,fully-?uorinated liquid ideal for use in many single phase heat transfer applications in the semiconductor manufacturing industry. Its liquid range (-50°C to 128°C) makes it ideal for a variety of applications such as etchers, ion implanters, testers and others. Because Fluorinert liquid FC-3283 is primarily a single compound, its composition will not shift or fractionate with time. This keeps ?uid loss to a minimum and insures that transport properties will not change with time.
Physical Properties物理化學(xué)性質(zhì)
Properties |
|
|
Appearance外觀 |
無色透明 |
|
Average Molecular Weight平均分子量 |
521 |
|
Boiling Point (1 atm)沸點(diǎn) |
128℃ |
|
Pour Point傾點(diǎn) |
﹣50℃ |
|
Estimated Critical Temperature高承受溫度 |
543 K |
|
Estimated Critical Pressure高承受壓力 |
1180000pa |
|
Vapor Pressure蒸汽壓 |
1440pa |
|
Latent Heat of Vaporization (at normal boiling point揮發(fā)潛熱 |
78J/g |
|
Liquid Density液體密度 |
1820kg/m3 |
|
Kinematic Viscosity運(yùn)動粘度 |
0.75 centipoise |
|
Absolute Viscosity粘度 |
1.8centipoise |
|
Liquid Speci?c Heat比熱 |
1100 J/ kg°C |
|
Liquid Thermal Conductivity導(dǎo)熱率 |
0.066 W/ m°C |
|
Coef?cient of Expansion膨脹系數(shù) |
0.0012 /°C |
|
Refractive Index折光率 |
1.290 |
|
Water Solubility溶水能力 |
<7 ppm |
|
Solubility in Water水中溶解力 |
<5 ppm |
|
Ozone Depletion Potential臭氧破壞潛值 |
0 |
|
Dielectric Strength介電強(qiáng)度 |
43 kV, 0.1" gap |
|
Dielectric Constant介電常數(shù) |
1.89 |
|
Electrical Resistivity絕緣強(qiáng)度 |
5.0 x 10(15)ohm cm |
Not for speci?cation purposes All values determined at 25°C unless otherwise speci?ed
簡繁切換